Air Digital MFC Mass electronic Flow Controller Oxygen Nitrogen Gas Flowmeter

Product Overview

The AMC2000 Mass Gas Flow Controller, abbreviated as MFC, is a device that accurately measures and controls the mass flow rate of gases. 

The sensor adopts a self-developed MEMS mass flow chip, which is precise, stable, and has characteristics such as high and low temperature resistance, good linearity, and fast response time. 

The AMC2000 range, accuracy, repeatability, response time, etc. were calibrated before leaving the factory.

Product Parameter

Application

1. Semiconductor Manufacturing

Gas mass flow controllers are connected to the gas supply line to accurately control the gas flow into the reaction chamber according to the set value to ensure the gas response time and stability during the growth or etching process of semiconductor materials.

2. Medical Ventilator

The gas mass flow controller is connected to the oxygen supply side of the ventilator to adjust the oxygen flow to the patient in real time according to the patient's condition, to ensure that the patient gets the accurate concentration of oxygen inhalation.

3. Laboratory gas system

Mass flow controllers are connected to various experimental gas sources to provide a set flow rate of stabilized gas for the experimental equipment to ensure the consistency of the experimental conditions and improve the repeatability of the experiments.