Views: 46 Author: Site Editor Publish Time: 2023-08-21 Origin: Site
MEMS chip technology is a technology that integrates mechanical microstructures and electronic circuits. It stands for Micro-Electro-Mechanical Systems, which utilizes semiconductor microfabrication technology to create a variety of micron-sized micro-mechanical structures on a chip, such as micro-sensors and micro-actuators, which are integrated with CMOS circuits.
These structures are integrated with CMOS circuitry, and the size of a MEMS chip is usually between microns and millimeters. It can realize some specific micro-mechanical system functions.
Development of MEMS technology dates back to the 1960's. The first academic papers on MEMS were published at that time. At that time, the first academic paper on MEMS was published. This paper introduced the concept of MEMS. Subsequently, in the 1980s, with the development of semiconductor manufacturing technology. In particular, advances in photolithography led major companies to investigate silicon-based MEMS.
In the 1990s, the first commercial MEMS product was introduced. It was used to improve airbag impact detection in automotive systems. Since then, MEMS technology has entered a period of rapid development, and the range of applications continues to expand. At the same time, various MEMS processing technologies and packaging methods have gradually matured and improved.
At present, MEMS technology has become a relatively mature technology platform. It is widely used in a variety of electronic systems, the main application of MEMS is concentrated in the automotive electronic system. There are also various consumer electronics products and industrial process control and other fields.
In the long run, with the development of the Internet of Things, MEMS sensor networks will also play an important role. In addition, the integrated design of MEMS and CMOS chips is also an important development direction.
1. Automotive electronic systems in a variety of sensors
2, Smart phones and tablet computers within the components
3, Biomedical testing and chemical analysis equipment
4, Aerospace, Defense Industry and other high-end fields
